Genesis ALD roll to roll vacuum machine

+ Genesis ALD

The World’s only commercially available roll-to-roll Atomic Level Deposition system for Lab-scale/pilot production

Genesis ALD Vacuum Coating Machine

Markets and Applications:

Functional ALD coatings for batteries, solar, and flexible electronics. The Genesis ALD is ideal for coating any roll-format substrates, and for multiple functional applications.

  • Passivation of cathodes and anodes for various types of lithium-ion and solid-state batteries.
  • Conductive layers and encapsulation for flexible solar cells
  • Moisture barriers for flexible electronics

Material Selection

Wide selection of ALD materials to meet your requirement. For years Beneq has pioneered roll-to-roll ALD systems for R&D and industrial production. Our common materials include Al2O3, TiO2, SiO2, ZnO, Zn(O,S) or any other material on request.

Feature Highlights

  • Web widths 0.1M – 0.5M
  • ALD coating thickness: max. 100nm
  • Dynamic deposition rate (Al2O3): 10 nm *m/min
  • Process temperature: max. 250°C


At maximum 420mm web width, the Genesis ALD is suitable for lab R&D or pilot-scale production. Designed to handle ALD films onto flexible substrates such as polymer or metal. Working with our partner E+R Group, the leading roll-to-roll vacuum coater company, we offer customers optional designs for wider webs and line integration.

Technical Specifications

  • Machine Speed
  • Production Minimum 0.1 mpm
  • Production Maximum 10 mpm

Web Material

Copper, Aluminium, Stainless steel, polymer, paper and other substrates suitable for vacuum coating

Incoming Reel

  • Web Width Maximum 420 mm
  • Web Width Minimum 100 mm
  • Diameter Maximum 300 mm
  • Core ID 152 mm
  • Interleave winders Yes
  • Interleave diameter maximum 150 mm

ALD Materials

Al2O3, TiO2, ZnO, ZnS, SiO2 and more

Maximum Temperature

250 ºC

Applications for our advanced Vacuum technology include:
Barrier, flexible electronics, battery, energy storage, solar, flexible solar, display, security, Research and Development

Get in touch
Genesis Vacuum Roll-to-Roll Machine

+ Custom development for Lab-scale/Pilot-scale vacuum coaters

We create pilot-scale vacuum coaters for R&D or small-scale production needs. Custom design available.

Our objective is to provide you with the ultimate solution that completely matches your needs, so our engineers will work with you from the concept stage to ensure you have the best possible design.

Advanced Vacuum coating development expertise.

+ Engineering Capabilities

Experienced mechanical and electrical assembly and installation engineers

  • Wide experience across diverse range of applications
  • Mechanical assembly, set-up and calibration of machine sections in-house
  • In-house panel build for control cubicles
  • Installations completed globally, turn-key start-ups possible

Machine shop for the manufacture of key components

  • Equipment portfolio focussed on key elements of machinery – machine frames and ties, rollers, precision components
  • Early/late shift pattern
  • Complete ‘ownership’ of critical components

 Tool room for manufacture of precision components

  • Precision equipment – wire EDM, CNC grinding and finishing
  • Precision inspection and component validation equipment – CMM, Jodon etc.

Certified to ISO 9001: 2015 quality system

  • Component inspection and quality validation
  • Assembly validation and sign-off at FAT and SAT
  • View our Quality Policy Click here

+ Manufacturing Capabilities

Experienced mechanical and electrical/control engineering team

  • 18 full-time engineers
  • Web transport, roller design, web guiding, spreading etc.
  • Drying technologies
  • Coating technologies
  • Machinery sub-systems – pneumatics, hydraulics, cooling systems, vacuum

Mechanical design in 3D drafting system with sophisticated FEA

  • Complex stress analysis of vacuum vessels ensures optimal design
  • Stress deflection analysis for optimal precision and accuracy

Full control systems design – hardware and software

  • Electrical control cubicles, HMI and operator pendants
  • Wide variety of vendors – Rockwell, Siemens, Bosch Rexroth, Mitsubishi etc.
  • Fully compliant safety systems
  • Software design and implementation
  • Complex drive algorithms – registration, dynamic positioning, tension sensitivity and processing
  • Testing and commissioning of systems by E+R staff

+ Advanced Vacuum Solutions

Genesis Vacuum Roll-to-Roll Machine

+ Genesis

Lab scale/pilot production machine.

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Genesis ALD

+ Genesis ALD

Lab scale/pilot production machine.

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Genesis L Series

+ Genesis L Series

Small scale production machine.

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Genesis XL Series

+ Genesis XL Series

Production scale equipment.

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+ Vacuum Technical Articles

Our team has a wealth of knowledge and expertise built up over decades of experience in their fields of specialism. Read our technical articles to find out how we have used this expertise, with creative problem solving and critical thinking, to meet and surpass our customers’ needs.